VCSEL, nke a na-akpọ Vertical Cavity Surface Emitting Laser zuru oke, bụ ụdị laser semiconductor. Ugbu a, ọtụtụ VCSEL na-adabere na GaAs semiconductor, na nfe ikuku bụ tumadi na infrared wave band.
N'afọ 1977, Prọfesọ Ika Kenichi nke Mahadum Teknụzụ Tokyo buru ụzọ tụpụta echiche nke laser nke na-ebupụta elu elu oghere kwụ ọtọ. N'oge mbụ, ọ na-achọkarị inweta otu longitudinal mode semiconductor laser nwere mmepụta kwụsiri ike site na ime ka ogologo oghere dị mkpụmkpụ. Agbanyeghị, n'ihi ogologo uru otu ụzọ dị mkpụmkpụ nke imewe a, ọ na-esiri ike ịnweta lasing laser, yabụ nyocha izizi nke VCSEL gbatịa ogologo oge. Afọ abụọ ka e mesịrị, Prọfesọ Yihe Jianyi ghọtara nke ọma pulsed lasing nke GaInAsP usoro lasers na 77 K site na iji teknụzụ epitaxy mmiri mmiri (usoro nke mmiri mmiri na-eme ka mmiri na-emepụta ihe siri ike site na ngwọta ma tinye ha na mkpụrụ iji mepụta otu-crystal mkpa n'ígwé). ). Na 1988, GaAs usoro VCSEL bụ teknụzụ organic vapor deposition (OCVD) toro iji nweta ọrụ na-aga n'ihu na okpomọkụ ụlọ. Site na mmepe nke teknụzụ epitaxial mgbe niile, enwere ike imepụta ihe owuwu semiconductor DBR nwere ngosipụta dị elu, nke na-eme ka usoro nyocha nke VCSEL dị ngwa ngwa. Na njedebe nke narị afọ nke 20, mgbe ụlọ ọrụ nyocha nwalechara usoro dị iche iche, ọnọdụ bụ isi nke VCSEL nwere oke oxidation ka edobere nke ọma. Ọ kwagara n'ime ogbo ntozu oke, ebe arụ ọrụ na-arụ ọrụ mgbe niile ma na-emeziwanye ya.
Eserese akụkụ nke oxidation Limited top emitting laser
Mpaghara na-arụ ọrụ bụ akụkụ dị mkpa nke ngwaọrụ ahụ. N'ihi na oghere VCSEL dị mkpụmkpụ, onye na-arụ ọrụ n'ime oghere ahụ kwesịrị inyekwu ụgwọ ọrụ maka ọnọdụ lasing.
Nke mbụ, a ghaghị izute ọnọdụ atọ n'otu oge iji mepụta laser:
1) e guzobere nkesa inversion nke ụgbọelu na mpaghara na-arụ ọrụ;
2) oghere resonant kwesịrị ekwesị na-enye ohere ka e nyeghachi radieshon na-akpali akpali azụ ọtụtụ oge iji mepụta oscillation laser; na
3) injection dị ugbu a dị ike iji mee ka uru anya dị ukwuu karịa ma ọ bụ nhata na nchikota nke mfu dị iche iche na izute ụfọdụ ọnọdụ ọnụ ụzọ dị ugbu a.
Ọnọdụ atọ ndị bụ isi kwekọrọ na echiche imewe nke nhazi ngwaọrụ VCSEL. Mpaghara VCSEL na-arụsi ọrụ ike na-eji nhazi nke ọma quantum mebiri emebi iji guzobe ihe ndabere maka ịghọta nkesa ntụgharị mbugharị ụgbọ mmiri. N'otu oge ahụ, a na-emepụta oghere na-emegharị emegharị nke nwere nlegharị anya kwesịrị ekwesị iji mee ka foton ndị a na-emepụta na-etolite na-emegharị ọnụ. N'ikpeazụ, a na-enye oge injection zuru oke iji mee ka photons nwee ike imeri mfu dị iche iche nke ngwaọrụ n'onwe ya iji mepụta ihe na-adịgide adịgide
Otu a ka Shenzhen HDV Optoelectronic Technology Co., Ltd., ụlọ ọrụ nkwurịta okwu anya, kọwara VCSEL.