I-VCSEL, ebizwa ngokuba yi-Vertical Cavity Surface Emitting Laser ngokupheleleyo, luhlobo lwe-laser semiconductor. Okwangoku, uninzi lwe-VCSEL lusekwe kwii-semiconductors ze-GaAs, kwaye i-wavelength ekhutshwayo ikakhulu kwi-infrared wave band.
Ngo-1977, uNjingalwazi u-Ika Kenichi weYunivesithi yaseTokyo yeTekhnoloji waqala wacebisa ingcamango yelaser ekhupha umngxuma othe nkqo. Kwiintsuku zokuqala, wayefuna ngokuyintloko ukufumana imowudi enye ye-semiconductor laser enemveliso ezinzileyo ngokunciphisa ubude becango. Nangona kunjalo, ngenxa yolu yilo olufutshane lwendlela enye yokuzuza ubude, kwaba ngumngeni ukufumana i-laser lasing, ngoko ke uphando lwakwangoko lweVCSEL lwandiswa. Kwiminyaka emibini kamva, uNjingalwazi uYihe Jianyi waqonda ngempumelelo i-pulsed lasing ye-GaInAsP series lasers kwi-77 K esebenzisa itekhnoloji yesigaba solwelo se-epitaxy (indlela ye-epitaxy yesigaba solwelo ukukhupha izinto eziqinileyo kwisisombululo kwaye uzibeke kwi-substrate ukuvelisa umaleko obhityileyo wekristale enye. ). Ngo-1988, ii-GaAs series VCSELs zakhuliswa ngetekhnoloji ye-organic chemical vapor deposition (OCVD) ukuphumeza umsebenzi oqhubekayo kwiqondo lobushushu legumbi. Ngophuhliso oluqhubekayo lwetekhnoloji ye-epitaxial, izakhiwo ze-semiconductor ze-DBR ezinokubonakala okuphezulu zingenziwa, ezikhawuleza kakhulu inkqubo yophando ye-VCSEL. Ekupheleni kwenkulungwane yama-20, emva kokuba amaziko ophando ezame iindlela ezahlukeneyo, imeko ye-oxidation-limited VCSEL yayisetiwe kakhulu. Emva koko yaya kwinqanaba lokuvuthwa, apho ukusebenza kwakusoloko kuphuculwa kwaye kuphuculwe.
Umzobo wecandelo we-oxidation enomda welaser ekhuphayo ephezulu
Ummandla osebenzayo yinxalenye ebalulekileyo yesixhobo. Ngenxa yokuba i-cavity ye-VCSEL imfutshane kakhulu, i-medium esebenzayo kwi-cavity ifuna ukubonelela ngembuyekezo yokuzuza ngakumbi kwimo ye-lasing.
Okokuqala, iimeko ezintathu kufuneka zifezekiswe ngaxeshanye ukuvelisa i-laser:
1) ukuhanjiswa kwe-carrier inversion kwingingqi esebenzayo kusekwe;
2) i-cavity ye-resonant efanelekileyo ivumela i-radiation evuselelweyo ukuba yondliwe ngamaxesha amaninzi ukwenza i-laser oscillation; kwaye
I-3) i-injection yangoku yomelele ngokwaneleyo ukwenza inzuzo ye-optical ibe mkhulu okanye ilingana nesixa seelahleko ezahlukeneyo kwaye ihlangabezane neemeko ezithile zangoku.
Iimeko ezintathu eziphambili zihambelana nombono woyilo lwesakhiwo sesixhobo seVCSEL. Ummandla osebenzayo we-VCSEL usebenzisa i-quantum well strained structure ukuseka isiseko sokuqonda ukuhanjiswa kwe-inversion carrier yangaphakathi. Ngelo xesha, i-resonant cavity kunye ne-reflection efanelekileyo yenzelwe ukwenza iifotoni ezikhutshwayo zenze i-oscillations ehambelanayo. Okokugqibela, isitofu esaneleyo sangoku sinikezelwe ukwenza iifotoni zoyise iilahleko ezahlukeneyo zesixhobo ngokwaso ukwenza ixesha elide
Yile ndlela i-Shenzhen HDV Optoelectronic Technology Co., Ltd., inkampani yonxibelelwano ye-optical, yachaza i-VCSEL.